CSEM-L Ultrasonic Coating Systems for Semiconductor
Product Description
Cheersonic is committed to various ultrasonic spraying solutions. Applied to semiconductor photoresist spraying, compared with traditional spin coating and dip coating, ultrasonic have the advantages of high uniformity and controllable coating area. Facts have proved that the photoresist coating prepared by ultrasonic coating has higher microstructure uniformity and uniformity than the traditional spin coating process. Ultrasonic spraying is a significantly efficient and economical photoresist coating process. Cheersonic’s spraying system has the characteristics of precision, flow control, and precise speed control. Due to the extremely low carrier gas volume, the liquid is gentle and non-impact during the spraying process, which greatly avoids the problem of liquid overspray and greatly improves the utilization rate of the liquid.
Key Features
• Ultrasonic nozzle, particle size is 0-40um
• High uniformity and uniformity
• Non-contact spraying
• Micro-flow spraying, multiple liquid feeding schemes
• High speed control accuracy
• High liquid utilization
Application
• Wafers
• MEMS
• Microfluidic Chips
• Lenses
• Filters
Parameter
| Ultrasonic spraying system | Ultrasonic nozzle mode (Optional multiple nozzles)Maximum spraying width: 400mmParticle size: 10-40umFlow rate: 0.5-70ml/min | Ultrasonic dispersion | Ultrasonic dispersion tank for pre-dispersion of liquidsUltrasonic dispersion syringe,Keep the suspension evenly dispersed during the spraying process |
| Liquid utilization rate | 95% | Plasma-spraying | Pre-surface treatment of samples |
| Spray uniformity | 5% | Compressed air | <divClean, dry unlubricated air |
| Delivery system | Automatic sample in and out, width adjustable: 150-800mm | Certification | CE, ISO9001:2015 |
| Motion accuracy | ±0.1mm | Exhaust | Built-in exhaust system |
| Control system | Self-developed 6-axis control system, 7-inch full-color touch LCD screen, can be set to automatic mode, jog debugging mode, with security system | Power requirements | 220V, +/-10%, 50-60Hz,single phase |
| Motors | Digital AC servo motor drive | Dimensions | 2170*1000*1900 mm |
| Constant flow metering pump | Stable and constant liquid supply for 24 hours without manual fluid change | Weight | 600kg |
