Ultrasonic Semiconductor Photoresist Spraying Machine

Product Description

Cheersonic is committed to various ultrasonic spraying solutions. Applied to semiconductor photoresist spraying, compared with traditional spin coating and dip coating, ultrasonic have the advantages of high uniformity and controllable coating area. Facts have proved that the photoresist coating prepared by ultrasonic coating has higher microstructure uniformity and uniformity than the traditional spin coating process. Ultrasonic spraying is a significantly efficient and economical photoresist coating process. Cheersonic’s spraying system has the characteristics of precision, flow control, and precise speed control. Due to the extremely low carrier gas volume, the liquid is gentle and non-impact during the spraying process, which greatly avoids the problem of liquid overspray and greatly improves the utilization rate of the liquid.
Ultrasonic Semiconductor Photoresist Spraying Machine

Key Features

• Ultrasonic nozzle, particle size is 0-40um
• High uniformity and uniformity
• Non-contact spraying
• Micro-flow spraying, multiple liquid feeding schemes
• High speed control accuracy
• High liquid utilization

Application

• Wafers
• MEMS
• Microfluidic Chips
• Lenses
• Filters

https://youtu.be/xwMv9yeFJOw

Parameter

 

Ultrasonic spraying system

Frequency: 50khz, 60khz, 120khzSpraying width: 80mmParticle content: <10%Particle size: 10-40um Liquid delivery(optional) Ultrasonic dispersing syringe, Keep the suspension evenly dispersed during the spraying process
Nozzle alignment Laser assisted alignment Material of liquid tube PTFE
Liquid utilization rate 95% Heating substrate(optional) Maximum temperature: 400℃
Spray uniformity 5% Temperature 0-40℃
Work area 300 x 300 mm (11.81” x 11.81”) Certifification CE, ISO9001:2015
Speed XY: 300mm/secZ: 50mm/sec Compressed air 551.6 kPa (80 PSI) dryunlubricated air
Syringe pump Flow rate: 0.01- 50ml/minOne syringe: up to 100ml Power requirements 220V, +/-10%, 50-60Hz,single phase
Control system Self-developed 6-axis control system, 7-inch full-color touch LCD screen, can be set to automatic mode, jog debugging mode, with security system Vacuum adsorption(optional) 150C heat/vacPower of vacuum pump: <500wPumping speed: ≥60L/min
Motion accuracy ±0.1mm Dimensions 1200L*950W*900H mm
Motors Digital AC servo motor drive Weight 300kg