Zeolite Thin Films Spray

Zeolite Thin Films Spray. High-throughput fabrication of zeolite thin films via ultrasonic nozzle spray deposition

Zeolite thin films with ordered nanopores and a low dielectric constant can serve as an insulation layer in microelectronic devices. Herein, we report on a scalable method, ultrasonic nozzle spray deposition, which addresses this issue. A high-frequency standing wave introduced by the ultrasonic nozzle produces uniform sized droplets of the cast suspensions at a scale of tens to hundreds of micrometers, which results in a uniform thin film following the removal of the solvent. We focus on the deposition of thin films comprising pure-silica zeolite MFI on a silicon wafer substrate. We systematically investigated how the quality of the zeolite thin films is affected by the composition of the cast suspensions and UAM4000L operating parameters.